抄録
The fabrication of nano-porous film by utilizing solid-phase reduction method is reported. Pt nano-porous film with 80〜150nm-sized pores is fabricated through solid-phase reduction of ZnO nanowire (NW) array. The vertically aligned ZnO nanowire array is synthesized through a vapor-liquid-solid method on a sapphire substrate. Then the ZnO NWs are coated with a C film and a following Pt film. By performing the solid-phase reduction of the ZnO NWs with C, the Pt nano-porous film is fabricated. The result shows that the formed pores have a hexagonal shape, and the sizes of the pores have a good agreement with the diameters of the synthesized ZnO NWs. Hence, it is considered that the pore size can be controlled by varying the diameter of ZnO NW. Moreover, the present method is expected to be applied to fabricate the porous film with different shapes of pores by using other materials as different molds.
