The Proceedings of Mechanical Engineering Congress, Japan
Online ISSN : 2424-2667
ISSN-L : 2424-2667
2014
Session ID : J2230101
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J2230101 Investigation of electrostatic liner actuators by electret MEMS
Tatsuhiko SUGIYAMAMitsuru AOYAMAYasushi SHIBATAGen HASHIGUCHI
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
This paper reports a electrostatic liner actuator by electret MEMS. The actuator is three-terminal comb-drive actuator. The displacement of the comb-drive actuator by applied voltage is parabolic function in general. However, the displacement become liner by electret MEMS of which a electret film is formed on one comb electrode because the second-order term of the displacement is cancel between the electret electrode and the non-electret.
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© 2014 The Japan Society of Mechanical Engineers
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