S1330203 多孔質研磨パッドの研磨特性([S133-02]先進砥粒加工技術(2))

抄録

In this paper, we described the polishing performance of soda-lime glass using the urethane resin and the epoxy resin polishing pads. The epoxy resin pads can improve the stagnation of abrasives on the surface of polishing pad. The epoxy resin pad and urethane-epoxy resin polishing pad showed higher removal rate and lower surface roughness than a conventional urethane resin polishing pad. We also investigated the polishing characteristics of polishing pads made by the urethane resin or epoxy resin. It was found that the epoxy resin polishing pad could hold abrasives on the flat area of polishing pad and improve the polishing ability. It was also clarified that pore size impact polishing performance of urethane resin pad greatly.