マイクロスケールの環境制御引張試験法の開発

抄録

The purpose of this study is to evaluate mechanical properties of the micro scale material in various environments such as at high temperature, in liquid, in vacuum, and in gas by using tensile test to measure the load with non -contact method. The device consists of specimen and mirror with torsion bars that rotates when the specimen was stretched. Finite element analysis was used to determine the size of specimen and verify that stress applied to the specimen and rotation angle of the mirror.