振動発電に用いる高精能エレクトレットの開発

―エレクトレット表面へのテクスチャ付与の影響評価―

抄録

We have developed a small generator (VEH) that generates electricity by vibration. A material called an electret that maintains a constant surface potential is used for this VEH. However, if this potential is too high, there arises a problem that the movable electrode and the electret are affixed by the electrostatic attraction force and power generation is hindered. In order to solve this problem, we applied a micrometer class texture to the electret surface. As a result, it is possible to obtain three advantages such as reduction of electret sticking force, improvement of surface potential, improvement in power generation amount, and power generation amount of 14 μW is confirmed against vibration of acceleration 0.2 g.