2層薄膜RTD式熱流束センサの自己発熱に関する研究

抄録

We have developed a single layer thin film heat flux sensor using MEMS technology to quantitatively evaluate a cooling loss inside the engine. The sensor succeeded in capturing high-speed heat flux fluctuations, however the direct current component of the heat flux wasn’t measured since thermal information on the backside of the sensor substrate was unknown. In this study, we developed a double layer thin film resistance sensor for measuring the total heat flux including both DC and AC components. We report that how much thermal resistance should be given to the mathematical model according to the known heat flux by using impinging jet and a comparison among temperature measurement methods, an individual and a differential method.