超小型フローベクトルセンサの3次元伝熱シミュレーション：

高風速域のセンサ出力特性

抄録

A micro-machined thermal flow sensor, i.e., “Flow vector sensor (FVS)”, can measure air-flow velocity and direction. We numerically examine heat transfer phenomena for the FVS, to clarify its thermal characteristics. The heat transfer from the FVS to air-flow is found to affect the measurement accuracy, especially in high-speed winds.