圧電バルブレスポンプ・ミキサに関するマルチフィジックス連成解析

抄録

In recent years, microfluidic devices are expected to be applied in a wide range of medical and chemical fields, and higher performance is required for pumping and mixing. In this study, A new Mooney-type piezoelectric actuator consisting of a bimorph piezoelectric actuator and a metal cap was applied to a Y-shaped microfluidic device, and its performance was evaluated by a piezoelectric-fluid coupled analysis. As a result, compared with the conventional bimorph piezoelectric actuator, we confirmed about 19 times improvement in the liquid transfer amount and verified the superiority of the new actuator.