パルス幅可変ピコ秒ファイバーレーザによる黒色アクリル樹脂の表面微細加工

抄録

In this study, fine grooves were processed on the surfaces of acrylic resins using a variable-pulse-width-picosecond laser. The near-infrared radiation range objectives for bright-field observation is introduced near the laser beam exit. This objective lens has a high focusing ability. (the beam diameter is approximately 46 μm when using a 5× lens and approximately 2.4 μm when using a 100× lens.) We derived the optimum processing conditions based on the relationships between the surface properties and XY stage scanning speed. As previous studies, we found that the groove shapes can be controlled by adjusting the XY stage scanning speed and duty cycle. The groove shapes were compared and the differences in the fabricated shapes from the previous research were quantitatively shown. The slope of XY stage or the roughness of workpieces before laser processing were evaluated because some groove shapes had low quality. It was suggested that measuring the roughness and waviness of workpieces prior to laser processing and adopting the low-frequency processing conditions could help solve problems during laser processing.