反射率温度依存性を用いたレーザー光反射強度計測による表面温度の非接触測定

抄録

In this study, an optical system was developed to establish a highly accurate noncontact temperature measurement technique using the thermoreflectance (TR) method, which utilizes the temperature dependence of the reflectance of metals. The C_TR [1/K], the temperature dependence of the reflectance, used to calculate the temperature variation is very small, on the order of 10^-3 to 10^-5, and must be obtained experimentally because it is a complex phenomenon that is difficult to analyze. Most of the C_TR studies are on pure metals, and only a few on alloys. In this paper, the C_TR of Aluminum alloy(A7075) is measured and compared with that of pure Aluminum, and the measurement accuracy and linearity are evaluated. The measurements yielded average C_TR of 6.31×10^-5 [1/K] and 8.99×10^-5 [1/K] for pure Al and A7075, respectively, with an reflectance measurement accuracy of 1.62×10^-5. The C_TR variation was larger for A7075 than for pure Al at different temperatures, which may be dueto interference from the oxide film.