抄録
Two types of arrayed micro hot-film shear stress sensor for feedback control of wall turbulence were developed by silicon surface micromachining technique. Platinum thin film heater having 200-300 microns in length is patterned on a silcon-nitride diaphragm, where air cavity is formed underneath. For the streamwise shear stress sensor, each chip has eight shear stress sensors with 1mm pitch, while four V-shaped sensors with 2mm pitch is fabricated on the two-component shear stress sensor chip. The response of each sensor was examined in a turbulent air channel flow. It is indicated that the area of heater is a dominant design parameter for determining the ratio relative sensitivity.
