抄録
This paper describes design and experiment of a self-supporting poly-Si thermoelectric device. The device can be used for sensing element of temperature sensors, radiation sensors, and power suppliers. Thermoelectric legs are made of Au/Cr and poly-Si. The array that is connected with 10 thermoelectric legs can be realized. The device was fabricated by the MICS (Micromachine Integrated Chip Survice). Results of experiments were compared with a calculation in order to confirm the function of the proposed device.
