抄録
To realize a more higher recording density of hard disk drive, it is possible to consider the reducing of interfacing gap between a disk and a magnetic flying slider. However, there are some problems such as a flying gap difference between inner and outer disk track position and assembling tolerance of mechanical parts, which needs a sensing elements to measure the flying gap in real-time. The maximum flying gap is about tens of nanometers, a solid-state sensor is a proper type to measure a flying gap by fringe-field capacitance. Therefore we propose a proximity sensor whose electrodes are seperated almost zero in horizontal direction. It can measure a nearly zero to tens of nanometers gap. The fringe-field capacitance is varied with a proximity distance of measuring objects regardless of conductive or nonconductive materials.
