抄録
Michelson laser interferometry for measuring head-disk spacing has extended to the case of through-glass-disk. This method utilizes two kinds of fringe patterns formed over the slider lubricating surface and the glass inner surface. Two kinds of pseudo phase shifts generated by light transit through the glass disk and by the light reflection on the conductive slider surface were obtained from the calculation using the multi-beam interference. After correcting the pseudo phase shifts, measured spacings were observed to lay in close proximity to the theoretical results.
