抄録
A novel laser displacement sensor which detects the intensity distribution of standing wave using newly developed thin film photodiode is described. The almost incident laser beam travels through the photodiode active layer before absorption and transmits to the down stream of the reflecting sample surface. By the superposition between the incident and the reflected light beams, the standing wave is generated including in the photodiode active layer. If the active layer has the appropriate thickness, which is thinner than a half of the wave length, the intensity distribution of the standing wave can be measured. We have fabricated the ultra-thin photodiode. And the sensor package is newly realized including a can type laser diode as the light source in the finger-tip size. The feasibility as the small sensor package is confirmed.
