抄録
We are developing an incremental optical angular displacement sensor that features simple structure and small size. This sensor consists of an optical sensor unit and sensor electronics. In the optical sensor unit, a cylindrical scale and an optical read head are assembled. The sensor electronics include an 0-E module and a signal processing electronics. An experimental sensor has a measurement range of 106 degrees, a resolution of 0.057 degrees, and an accuracy of 0.012 degrees. It is possible to make a 21×5×26mm sensor unit.
