抄録
The present paper investigates the relationship between crack phenomena and electric resistance of an ITO thin film on polymer film. The electrical conductivity of ITO film was decreases due to the multiple film cracking. In order to predict the variation of electrical conductivity of ITO film with applied strain, we conducted the Monte Carlo simulation with a finite element analysis. This numerical procedure can easily and accurately calculate the stress distribution in the film on the elastic-plastic substrate. The predictions are found to have good agreements with the experimental results.
