抄録
Diamond-like carbon (DLC) films have been widely recognized as an excellent wear resistant coatings with a low friction coefficient against many kinds of counterparts. The tribological behavior of DLC films depend on not only the quality of the film but also the environmental conditions such as the substrate materials and the pressure applied. Particularly when the DLC films are distorted with the deformation of the soft substrate, the conventional DLC film should be damaged easily. In this study DLC films have been deposited by RF-plasma CVD from methane on the soft material substrates, such as a rubber and aluminum, and the friction and wear tests were conducted using a ball-on-flat configuration under some conditions. In the case of rubber substrate, DLC films show low friction coefficient from 0.2 to 0.3,even if large strain of ε=0.5 was applied to the substrate. A new coating method was proposed in the case of DLC coatings of Al substrate, which employs the segment structure of DLC film. It was found that the wear resistance of the Al substrate was significantly improved in comparison with the conventional DLC coatings.
