抄録
We has developed an ultrahigh-accuracy 3-D profilometer, which, using a new, in-house-developed atomic force probe, has an accuracy of 10nm. It is capable of measuring corners as small as 2 μm in radius and can cover an area up to 400x400x90(mm), providing a powerful boost to nano-level processing. A spherical lenses, semiconductor wafers, hard discs, all these products, and many others, could not exist without high precision measurements during their development and manufacture. The premiere ultra high-precision three-gimensional profilometer delivers superb performance using a variety of micro-measurements for a wide range of applications.
