年次大会講演論文集
Online ISSN : 2433-1325
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804 第一原理分子動力学法による Si/Al 接合部の構造に関する解析
梅野 宜崇北村 隆行
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会議録・要旨集 フリー

p. 221-222

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It is of great importance to elucidate atomic structure and bonding system at a contact of different materials in terms of understanding various characteristic properties emerged by the contact. In this study, ab initio molecular dynamics simulation on precipitation of Al atoms onto Si surface is conducted to investigate the atomic and electronic structure of the contact of Si/Ai. At first, Al atoms are settled above a ditch between dimer rows of the Si surface and are arranged in a line. After the ditch is filled with the Al atoms, Al atoms are adhered near the line and they construct bonds with each other and with Si atoms in the dimers as well. Consequently, a dense Al layer is formed on the Si surface.
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© 2002 一般社団法人日本機械学会
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