抄録
We have developed a novel electrostatic micropump driven by traveling wave using surface micromachining techniques. This micropump can transport the liquid in both directions by only changing the driving signals for the electrostatic actuators without mechanical valves. The traveling wave can be generated by superimposing two standing waves whose phase differs by π/2 in time and space each other. The two standing waves are electrostatically produced along microchannel by comb electrodes which are operated by sine-wave voltages. The rectangular cross-section microchannel is composed of three rigid walls and one flexible wall on which the traveling wave is imposed. This micropump is smaller and simpler than other micropumps and is made of harmless materials (Al, Silicone rubber and Acrylate resin). We show that the developed micropump is suitable for the πTAS product applications.
