年次大会講演論文集
Online ISSN : 2433-1325
セッションID: 908
会議情報
光音響法による表面傾斜欠陥の検出(S05-2 薄膜界面はく離・欠陥評価,S05 薄膜の強度物性と信頼性)
遠藤 春男猪股 恵太宮本 克彦星宮 務
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会議録・要旨集 フリー

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抄録
In this study, the imaging of simulated surface defect using a photoacoustic (PA) microscope has been demonstrated. The surface tilt defect was the slit-type simulated defect, whose length was fixed to be about 4.0mm. The surface tilt defect with a width of 0.3 mm was introduced into the specimen by mechanical processing. The depth and angle values of the surface defects were 0.3 mm and 60, 70, 80 and 90 degrees in nominal value, respectively. By defining the "degree of asymmetry" as the ratio of the difference between two peaks of phase signal distribution to the height of their mean value from the background, the correlation coefficient between tilt angle and the degree of asymmetry showed the value of 0.997.
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© 2004 一般社団法人日本機械学会
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