抄録
We have designed and fabricated three-dimensional (3D) stages driven by electrostatic comb actuators. The stage consists of traveling tables, suspensions and comb actuator(s). The suspension incorporates a pair of leaf springs inclined to the substrate. First, 3D electrostatic stages were fabricated on an SOI (silicon on insulator) wafer. Deep reactive ion etching processes were adopted to fabricate the micro structures including inclined leaf spring. Then a 3D stage was installed in an AFM (atomic force microscope). Topography images were captured in each back and forth motion during a raster scanning. The deformation of the cantilever due to friction force was detected from the deference between the images.
