Abstract
This paper shows two types of new functional fluidic devices for chemical micro reactors; (1) an active catalytic system and (2) a micro flask. The active catalytic system consists of a micro chamber with two electrode thin films and micro catalytic particles of 100 to 500 micron meter in diameter. Electrostatic force enables handling micro catalytic particles in micro chambers to realize uniform mixing and acceleration of chemical reactions. A micro flask is also fabricated using piezoelectric materials, which oscillates to work as a micro agitator and an ultrasonic cleaner. The potentials of these new functional fluidic devices in micro reactors are discussed.
