Study on Precision Grinding of Micro Aspherical Surface : Proposal and the accuracy evaluation of grinding point fixation control method in diagonal axis grinding method

Abstract

This paper deals with a precision grinding of micro axis-symmetric aspherical surface by use of a resinoid bonded diamond wheel. Ultra-precision grinding system of axis-symmetric aspherical surface was developed. In this study, a grinding point fixation control method on 45 degrees diagonal axis grinding method was proposed and its form deviation was evaluated. In this system, a resinoid bonded diamond wheel was scanned on the workpiece surface 3-dimentionally controlled with Inm resolution by linear scale feedback system.