Abstract
Demands for high accurate micro-machining using mechanical processes are increasing, an in-process status monitoring method is getting more important. It is difficult to apply conventional monitoring methods to ultraprecision machining because of less sensitivity, less responsibility and less reliability. In this study, in order to establish in-process monitoring technologies for ultraprecision machining, we have proposed a micro thermopile sensor on the diamond tool. The sensor is mounted on the surface of diamond tool using micro fabrications processes for semiconductor production, and its performances are investigated through a series of actual cutting experiments.
