抄録
A laser micro drilling into austenitic stainless steel (t=1mm) was performed with Bessel pulsed laser beam (532nm, pulse width 10nsec, 10Hz). The beam energy is 7mJ/pulse and the range of irradiated pulses is between 400 and 1000. The diameter and depth of the drilled holes are analyzed by SEM observation of replica sample. The diameter and depth of the hole are around 12μm and 60〜70μm, respectively. The aspect ratio doesn't change in the range of our experimental conditions. This result suggested that the laser fluenece is dominant factor of aspect ratio of the drilled holes.
