抄録
This paper proposes an ultra high sensitive stain gauge using surface acoustic wave (SAW) for Radio Frequency (RF)-ID and sensor networks. The strain measuring method by observing a shift of a SAW resonant frequency due to strain was numerically discussed. Sensitivity obtained by the method was strain of 10^<-10> when the SAW resonant frequency and frequency resolution were supposed 1GHz and 0.1Hz, respectively. A SAW device was designed and fabricated onto a Quartz crystal substrate by micromachining. It was shown that the resonant frequency characteristics of the device were compared and consistent with that obtained by theoretical analysis.
