抄録
The Rayleigh wave is used to create surface elliptical wave motion for powering linear micro motors. In analysing and modeling the performance of such motors, the Rayleigh wave is typically assumed to propagated in a semi-infinite medium. However, real systems are finite and reflection of the progating wave at device boundarys or discontinuties reduces the amplitude of the surface acoustic wave. In this paper, the "active sink method" is used to cancel the reflected wave at the boundary between the free and electrodes surfaces of a linear acoustic wave motor. This method is implemented by analytically calculating the impedance of a primary Interdigit Tranducer (IDT) and actively matching it with a secondary IDT. The simulated results for proposed system are compared with that of a conventional one.
