抄録
Free and forced vibrations of a cantilever with a concentrated mass and spring at the tip used in an atomic force microscope (AFM) have been analysed and vibration amplitudes of the cantilever end that will be measured by using the optical lever method have been predicted theoretically. It was found that the predicted amplitude includes errors and correction of the amplitude depending on the vibration freqency is necessary. The correction factor has been derived and presented. These results are useful for ultrahigh accuracy measurements, especially dynamic measurements, using the AFM.
