抄録
Recently, micro plastic forming is attracted a lot of attention because of their advantage for mass productive and production efficiency. The technologies of creating the micro die occupy an important place in micro plastic forming. It is difficult to apply traditional method of surface process to micro die. So, in this paper, ion beam irradiation was used as surface process for micro die (round shape punch) made of carbide or high speed steel and surface roughness and surface properties (Young's modulus and hardness) were estimated. Irradiation time and accelerating voltage, ion species was set up as parameter in ion beam irradiation. In all conditions surface roughness was reduced. In long irradiation time and high accelerating voltage surface properties was improved. After time durability that is influenced by ion beam irradiation will be estimated with test used actual equipment.
