3946 透過型電子顕微鏡によるナノカンチレバーの界面端き裂発生のその場観察(S21-1 強度物性評価法,S21 ナノ・マイクロ構造体の強度物性と信頼性)

抄録

A novel in situ TEM fracture testing method is developed to elucidate the mechanics dominating crack initiation at an interface edge in nano-structures. The testing method effectively utilizes the bending moment of a cantilever to cause a tensile stress to the interface of interest. The nano-scale cantilever specimens with interfaces are fabricated from a multi-layered material (Si/Cu/SiN) using FIB process technique. The validity of the testing method is demonstrated by conducting interfacial crack initiation experiments for the specimens with different size. For each specimen, the crack is initiated from the free-edge of interface between Si/Cu at a maximum load, P_c, and the specimen is instantly separated at the interface. Using the experimental results the stress fields along the Si/Cu interface at the crack initiation are analyzed for each specimen by finite element method. This reveals that the crack initiation of the Si/Cu interface is governed by the normal stress on the interface near the edge