3954 シリコン基板上のCVDダイヤモンド薄膜の疲労信頼性とその評価(S21-3 強度物性と信頼性,S21 ナノ・マイクロ構造体の強度物性と信頼性)
詳細
This paper describes the fatigue characteristics of CVD diamond films on a silicon substrate. Repeated indentation load was applied to the diamond film surface with a spherical indenter to introduce mechanical fatigue damage in the films and interfaces with a minimum amount of tribological surface damage. Appearance of fatigue damage was quite sensitive to the methane concentration in the source gas mixture for deposition, which was closely correlated with the toughness of films and interfaces obtained in previous studies. Fatigue damage in this study seems more susceptible to the strength of interface than the strength of film, while the film strength has a stronger influence on the state of damage under monotonically increasing indentation loads.
