抄録
We have developed a fine laser processing equipment with high accuracy positioning as well as wide processing area. Galvanometer scanners and scanning lens make it possible to move the laser spots faster than mechanical stages do. So far this equipment had a large field curvature giving a bad influence on precision processing over wide scanning area. So we examined an influence of beam expander lens on field curvature by both an optical analysis and experiments. In the analysis the minimum field curvature was about 0.14mm. On the other hand the measured minimum field curvature was about 4 times larger than the analytical value. After the processing to evaluate process performance of this system the process marks were measured with an optical microscope and a surface profilometer.
