抄録
In recent years, the hollowing out of domestic manufacturing is becoming serious problem. On the other hand, it accelerates the development of new technology and the creation of new field in fact. The machining microfabrication is typical one of those fields. In this field, the most of the targeted work size is less than palm-top size. Although the conventional high precise machinery is large and high expensive, and those combination are becoming inefficiently from the viewpoint of its initial cost, running cost, and footprint. Based on such industrial background, we have developed ultra high precise machinery (MNF2005) with compact body. The feeding mechanism of MNF2005 is composed x-y-z 3 axes, the positioning accuracy of x-axis and y-axis are less than 50nm and z-axis is less than 500nm, respectively. This high precise mechanism enables to reduce the processing surface roughness less than 20nm (Ra). In this paper, we report the performance of MNF2005 in more detail.
