抄録
A nano-coordinate measuring machine (nano-CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of 10 mm^3. To meet these stringent requirements, a probe based on the laser trapping technique is employe d as a micro-probe. This paper describes the development of the nano-CMM system with a laser-trapping probe and also des cribes the performance of the probe via an assessment of the flatness and sphere. It is observed that our developed nano-coo rdinate measuring system can measure three-dimensional objects with estimated uncertainty of 335 nm (k = 2).
