年次大会講演論文集
Online ISSN : 2433-1325
セッションID: 310
会議情報
310 圧電薄膜を用いた流路壁面振動送液デバイスの特性評価(T02-1 マイクロナノメカトロニクス(1),大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)
小川 純矢鈴木 孝明神野 伊策小寺 秀俊
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In this paper, we propose and study innovative liquid pimping devices for microfluidic systems such as pTAS. In our study, microchaimels with vibrating wall were fabricated on silicon on insulator (SOI). The vibrating wall was composed of piezoelectric PZT thin films deposited on the microchannel wall. The microchannel can transport liquid by traveling wave induced on channel wall by applying sinusoidal voltages to each patterned top electrodes with different phase. The active microchannel of 200μm wide was fabricated by the deep reactive ion etching(DRIE) process. The displacement profiles of the vibrating wall and frequency response were measured by a laser Doppler vibrometer. We examined the difference of the characteristics that were the to the effect of the structure of channel wall.
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© 2008 一般社団法人日本機械学会
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