抄録
The actuators using electrostatic energy have been reported. However, these actuators generally can generate low power. We proposed the novel drive principle of the microactuator, that makes electrostatic energy/force collaborate with the elastic energy/force. It is necessary to design the spring with the non-linearity to make the microactuator highly effective. In this paper, the non-linear spring was designed by using the FEM analysis. Mechanical performance of the micro actuator is also evaluated. Initial generated force of non-linear spring type is 2770 times higher than that of linear spring type.
