抄録
A novel electrical equivalent circuit model of the microfluidic system containing a valveless micropump and a viscoelastic PDMS microchannel was developed by considering inner-wall deformation of viscoelastic PDMS microchannel. The viscoelastic deformation of the PDMS inner wall was represented by a generalized viscoelastic model. Elastic and viscous moduli in the generalized visoelastic model were optimized based on the measured viscoelastic property. The validity of the developed model was evaluated by comparing the dynamic flow behavior calculated by the equivalent circuit model with μ-PIV measurement result. The good agreements concluded that a dynamic flow characteristic of the whole microfluidic system is able to be analyzed precisely by the developed equivalent circuit model.