抄録
The authors had investigated a progressive wave type piezoelectric pump previously. About 15ml/min. flux were obtained. In order to obtain more amount of flux, new type of vibration plate is proposed in this report. The new one uses single bimorph piezoelectric elements, and vibrates all surface of the plate. Motion of the new vibration plate is like swimming motion of dolphin or motion of oriental fan. Behavior of the vibration plate is investigated with FEM analysis. In comparison with the vibration plate of progressive type pump, the new single bimorph element type vibration plate can vibrate by twice amplitude. It is estimated that flux of pump may increase by the new type vibration plate.
