抄録
Tribological coatings such as Cr-N, TiBN, Me-DLC(Me-C:H) were coated by Plasma Booster Sputtering(PBS) process using conventional balanced DC magnetron sputtering cathode in combination with additional DC plasma discharge between cathode and booster electrode. Seizure load and dynamic friction coefficient between coated steel substrate and steel(SCM415) was measured by pin and V-block type Faville tester. Also nano-hardness and Young's modulus was measured by nano-indenter using Berkovich diamond indenter.
