F-0434 超音波振動を用いたアクティブエアベアリング : 円すい面形状を持つ空気軸受の試作(S38-4 超音波技術応用)(S38 機構の開発とシミュレーション)

抄録

This study proposes an active air bearing based on the squeeze air film generated by the ultrasonic oscillation. The squeeze film generated by ultrasonic oscillator lifts and supports the rotor without residual vibrations and without use of any air supply. In this paper, a split rotor with two conical inside surfaces and a cone-shaped oscillator are employed. Radial and axial runouts were estimated by measuring displacements of a reference ball mounted on the rotor with displacement sensors. Axial runout of the rotor during rotation was less than 0.5 μm. Moreover, non-repeatable runout in axial direction was less than 0.33 μm. However, radial runout of the ball was considerably large because of attitude variations of the rotor.