F-0506 X線ミラーの超精密ELID研削加工(G13-2 生産加工・工作機械(2))(G13 生産加工・工作機械部門一般講演)

林 偉民; 大森 整; 山形 豊; 守安 精; 上野 嘉之; 劉 長嶺; 森田 晋也

doi:10.1299/jsmemecjo.III.01.1.0_277

III.01.1

Session ID : F-0506

DOI https://doi.org/10.1299/jsmemecjo.III.01.1.0_277

Conference information

F-0506 Ultraprecision ELID Grinding Method of the X-ray Mirrors

Weimin LIN, Hitoshi OHMORI, Yutaka YAMAGATA, Sei MORIYASU, Yoshiyuki UENO, Changling LIU, Shin-ya MORITA

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Keywords: ELID (Electrolytic In-Process Dressing), Ultraprecision Grinding, X-ray Mirror, Surface Roughness, Fused Silica Mirror

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

This paper describes an ultraprecision ELID (Electrolytic In-Process Dressing) grinding method of fused silica and single crystal silicon X-ray mirrors with a large ultraprecision aspheric grinding system, and the grinding characteristics. The X-ray mirrors materials was ground with the grinding system by ELID-grinding using #325, #1200 and #4000 cast iron-cobalt hybrid bonded diamond wheels, and the grinding characteristics of this X-ray mirror were investigated. The results, very good ground surface of Ra 8.7nm and Ry 97nm of 300mm mirror can be achieved.

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