Abstract
Research and development activities at the Institute for Microstructure Technology (IMI) of Forschungszentrum Karlsruhe, Germany (FZK), are focused on microsystems technologies. The strategic areas for applications are micro-optics and micro-fluidics. Microfabrication processes are developed for manufacturing prototypes or micro-components/microsystems in small volume for customers. Finally, production technologies can be transferred to mdustrial customers. Two core fabrication technologies have been established at IMT : LIGA that was invented and developed at FZK is currently used predominantly for applications in micro-optics al well as advanced research projects. The basis for LIGA is deep X-ray lithography at the ANKA synchrotron radiation source at FZK The second one, AMANDA, serves for fabricating polymer micro-fluidic components and systems.
