MMT-07 NANO-SERVOMECHANICS OF A MEMS DEVICE FOR AFM-BASED STORAGE TECHNOLOGY

Abstract

Nanoscale mechanics and servo control of a MEMS-based scanner device are considered for two-dimensional motion generation. A servo structure is dedsribed that augments a conventional control algorithm, including a digital proportional-integral-derivative type, so that the significant stiffness characteristic of a MEMS-based scanner is neutralized by means of a stiffness-compensation method. This approach has been verified experimentally.