Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Online ISSN : 2424-3132
2003
Conference information
HDI-28 DIRECT VISUALIZATION OF THIN FILM SPREADING OVER MAGNETIC DISK SURFACE BY LOW-COHERENCE PHASE-SHIFTING INTERFEROMETRY
Hedong ZHANGYasunaga MITSUYASakiko ISHIDAKenji FUKUZAWA
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 245-246

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Abstract
Low-coherence phase-shifting interferometry is presented for direct visualization of thin film spreading over a magnetic disk surface. In this method, three-dimensional measurement is straightforwardly realized by introducing phase-shifting function to the interferometry, and image noise is remarkably suppressed by employing an incoherent white light source. The applicability of this method was demonstrated by experimental results.
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© 2003 The Japan Society of Mechanical Engineers
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