抄録
In order to solve in-use stiction problem, we have proposed a new method using square pyramids structure that are formed on the substrate. These square pyramids were made in sacrificial layers consisting of two qualitatively different silicon oxide films. According to etching rate difference between two sacrificial layers, the square pyramids can be obtained. We have fabricated capacitive actuators to confirm experimentally our newly proposed stiction free sacrificial layer releasing technique. As a result of experiment, it has revealed our double sacrificial layers process to be an effective method preventing in-use stiction.
