ORS-09 DESIGN AND FABRICATION OF PLASMON-ENHANCED OPTICAL HEADS

Abstract

Plasmon-enhanced (PE) optical heads were designed and fabricated with a plasmon-enhanced optical element and optical waveguides, sliders and suspensions. Flying type and contact type sliders are designed for the optical head. The difference between the flying height at the PE-optical element and at the location of the minimum flying height is designed within 15 % for the flying height around 10 nm. The contact flying head is designed to minimize the effect of the flying pressure. The most important issue for the optical heads is the shrinkage features of the slider with small optical guides.