抄録
Areal recording density of hard disk drive (HDD) is growing rapidly with increased track density and linear bit density recently. High track density requires precise head positioning and high servo bandwidth. The dual-stage actuation system using MEMS actuator has been considered as one promising precise positioning solution. However, the frequency of microactuator may shift from its mean value during MEMS fabrication process. It is difficult for control system to compensate its 1^<st> resonance frequency to achieve high servo bandwidth. In this paper, a robust solution is proposed to minimize microactuator's resonance frequency shift so that its 1^<st> frequency is insensitive to the effects of sources of processing variability and effective compensatory for high servo bandwidth.
