抄録
Nanometer scale protuberance and groove were processed on a silicon surface by diamond tip sliding using atomic force microscope (AFM) in an atmosphere. To produce the three dimensional nano profile, the processed profile dependence on load was evaluated, and then KOH solution etching was applied on the processed surface. Mechanochemically processed protuberance, groove and flat (undeformed) processed areas act as etching mask for KOH solution.
